Positioning apparatus, exposure apparatus, and device...

Details Positioning apparatus, exposure apparatus, and device... Positioning apparatus, exposure apparatus, and device...

2007-12-25

2007-12-25

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S030000

Reexamination Certificate

active

11378511

ABSTRACT:
This invention discloses an apparatus having a base and a movable body which is driven to move along the base. The apparatus includes a generator configured to generate a driving signal for the movable body, a temperature adjusting mechanism configured to adjust temperature of the base, and a controller configured to control a manipulated variable for the temperature control mechanism based on the generated driving signal.

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patent: 6509951 (2003-01-01), Loopstra et al.
patent: 6810298 (2004-10-01), Emoto
patent: 6987335 (2006-01-01), Korenaga
patent: 7116396 (2006-10-01), Tsuji et al.
patent: 3127525 (1993-05-01), None
patent: 3127525 (2000-11-01), None
patent: 2004-254489 (2004-09-01), None

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