Positioning apparatus, exposure apparatus and device...

Details Positioning apparatus, exposure apparatus and device... Positioning apparatus, exposure apparatus and device...

2011-03-15

2011-03-15

Lee, Hwa S. A (Department: 2886)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

07907287

ABSTRACT:
A positioning apparatus, which positions a stage, includes a measurement system that measures a position of the stage. The measurement system includes a plurality of measuring devices that are spaced apart from each other along a first direction and measure a position of the stage in a second direction. A switching unit switches between the measuring devices to measure the position of the stage when the stage moves in at least the first direction. A correction unit corrects, based on an acceleration of the stage, the value measured by the measurement system. When the switching unit switches between the plurality of measuring devices, the correction unit corrects, based on a value obtained by the correction, a value measured by a measuring device after the switching.

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