Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate
2005-07-12
2005-07-12
Lee, John P. (Department: 2881)
Radiant energy
Irradiation of objects or material
Irradiation of semiconductor devices
C250S442110
Reexamination Certificate
active
06917046
ABSTRACT:
A positioning apparatus includes a first stage, capable of moving in a first direction and a second direction which is orthogonal to the first direction, a second stage, arranged on the first stage and moved with the first stage, and capable of moving in the first direction and the second direction and capable of mounting an object to be adjusted in a position and a rotation, and a driving mechanism, arranged on the first stage, and for moving the second stage relative to the first stage. The driving mechanism includes a first electromagnet which generates first suction power, a second electromagnet, provided opposite to and away from the first electromagnet, which generates second suction power, and a core member, which is held movable between the first and second electromagnets, and moves by being pulled in accordance with the first and/or second suction power.
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Canon Kabushiki Kaisha
Fernandez Kalimah
Fitzpatrick ,Cella, Harper & Scinto
Lee John P.
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