Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2007-03-20
2007-03-20
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
Reexamination Certificate
active
11157781
ABSTRACT:
A positioning apparatus includes first and second stages, a pair of first mirrors having reflective surfaces disposed on the first stage at an acute angle with a vertical axis, a pair of second mirrors disposed on the second stage and having reflective surfaces orthogonal to the vertical axis, a reference structure functioning as a reference for measuring the vertical position of the second stage, a pair of third mirrors disposed on the reference structure and having reflective surfaces orthogonal to the vertical axis, and a pair of interferometers for measuring the vertical position of the second stage using the first, second, and third mirrors.
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Canon U.S.A. Inc I.P. Div
Lyons Michael A.
Toatley , Jr. Gregory J.
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