Photocopying – Projection printing and copying cameras – Detailed holder for photosensitive paper
Reexamination Certificate
2006-01-31
2006-01-31
Kim, Peter B. (Department: 2851)
Photocopying
Projection printing and copying cameras
Detailed holder for photosensitive paper
C355S075000, C355S053000
Reexamination Certificate
active
06992755
ABSTRACT:
A positioning apparatus includes a wafer chuck which retains a wafer and a hollow plate unit which retains the chuck, which is composed of a ceramic material in an integral, hollow structure having a hollow section, the hollow section having a rib structure which serves to increase the natural frequency of the hollow plate unit with respect to torsional mode vibration, and which has holes for providing connection between the interior and exterior of the hollow section. The rib structure is constructed such that a rib unit having a rectangular shape in cross section, the sides thereof extending along X and Y fine movement directions, and a rig unit having a diamond shape in cross section are alternately disposed inside each other and are bonded to each other.
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European Search Report dated Mar. 3, 2004, issued in corresponding European patent appln. No. 02 25 8091, forwarded in a Communication dated Mar. 26, 2004.
Canon Kabushiki Kaisha
Fitzpatrick ,Cella, Harper & Scinto
Kim Peter B.
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