Positioning apparatus and exposure apparatus

Details Positioning apparatus and exposure apparatus Positioning apparatus and exposure apparatus

2005-02-18

2009-10-13

Le, Dang D (Department: 2834)

Electrical generator or motor structure

Dynamoelectric

Rotary

C310S012060

Reexamination Certificate

active

07602091

ABSTRACT:
A positioning apparatus includes a beam which is driven in a first direction that is perpendicular to the longitudinal direction of the beam, a movable member which surrounds at least a part of the beam and moves with the beam moving in the first direction, an actuator which generates a force in the first direction between the beam and the movable member to control a positional relationship in the first direction between the beam and the movable member, and a position regulator arranged between the beam and the movable member and which regulates the positional relationship in the first direction between the beam and the movable member.

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Japanese Office Action dated Feb. 24, 2006, issued in corresponding Japanese patent application No. 2004-049938, with English translation.
Japanese Office Action dated Oct. 6, 2006, issued in corresponding Japanese patent application No. 2004-049938.

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