Positioning apparatus

Details Positioning apparatus Positioning apparatus

2007-12-25

2007-12-25

Fourson, George R. (Department: 2823)

Metal working

Barrier layer or semiconductor device making

C438S007000, C438S016000, C257SE21521, C256S013000, C256S013000

Reexamination Certificate

active

10947284

ABSTRACT:
A positioning apparatus for positioning a substrate. The positioning apparatus includes a setting system which selectively sets one of a center of the substrate and a specific portion of an edge of the substrate as a positioning reference in accordance with information inputted to the positioning apparatus, and a positioning system which positions the substrate based on a position of the positioning reference set by the setting system.

REFERENCES:
patent: 6188467 (2001-02-01), Yamatsu et al.
patent: 6819425 (2004-11-01), Kwan
patent: 2001/0016293 (2001-08-01), Nishi et al.
patent: 2004/0032575 (2004-02-01), Nishi et al.
patent: 2004/0101984 (2004-05-01), Heine et al.
patent: 2004/0191652 (2004-09-01), Dishon et al.
patent: 11-016806 (1999-01-01), None

Affiliated with

Also associated with

Rating

Positioning apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Positioning apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Positioning apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3871465