Positioning apparatus

Details Positioning apparatus Positioning apparatus

2006-06-13

2006-06-13

Patel, Vishal (Department: 3673)

Seal for a joint or juncture

Seal between relatively movable parts

Close proximity seal

C384S012000, C277S628000

Reexamination Certificate

active

07059607

ABSTRACT:
In the present positioning apparatus, a positioning apparatus, comprising: a box body including a process chamber exposed to a decompression environment in the interior of the box body and an opening allowing said process chamber to communicate with an outside; a moving member for shielding said opening of said box body with a slight clearance between said box body and the moving member and movable with respect to said opening of said box body; and a differential pumping seal for sealing said slight clearance between said opening of said box body and said moving member, wherein a portion of said moving member to be moved into the interior of said process chamber, when said moving member moves, is formed as an adsorption preventive area.

REFERENCES:
patent: 4191385 (1980-03-01), Fox et al.
patent: 4560880 (1985-12-01), Petric et al.
patent: 4726689 (1988-02-01), Pollock
patent: 6163033 (2000-12-01), Smick et al.
patent: 6172372 (2001-01-01), Vanderpot
patent: 6437351 (2002-08-01), Smick et al.
patent: 6445440 (2002-09-01), Bisschops et al.

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