Positioning apparatus

Details Positioning apparatus Positioning apparatus

2006-12-26

2006-12-26

Guadalupe-McCall, Yaritza (Department: 2859)

Geometrical instruments

Miscellaneous

Light direction

C033S573000

Reexamination Certificate

active

07152331

ABSTRACT:
A positioning apparatus has a stage, guide elements provided on both ends of the stage, and drive elements which are provided at one of both ends of the stage and move the stage along the guide elements. Like linear guide rails61A,61B and linear guide bearings23A,23B, two guide elements are provided in an area where a ball screw shaft52serving as a drive element is placed. One guide element is provided in an area where a non-drive element is provided.

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