Positioning apparatus

Details Positioning apparatus Positioning apparatus

1997-12-01

2000-06-20

Larkin, Daniel S.

Measuring and testing

Surface and cutting edge testing

Roughness

G01B 528

Patent

active

060763973

ABSTRACT:
The invention relates to a positioning apparatus, providing for an excursion of a tool (12) with respect to a sample or medium to be interacted with. The positioning apparatus comprises apparatus for applying a driving force (F.sub.D) which causes the excursion of the tool (12). Counteracting apparatus is provided which exerts a counteracting force (F.sub.C) to the driving force (F.sub.D). The counteracting apparatus comprises a deformable substance (25) which is mechanically coupled to the tool (12) and effects the counteracting force (F.sub.C) and further comprises adjustment means (28) allowing to adjust the deformability of the deformable substance (25).

REFERENCES:
patent: 3546929 (1970-12-01), Bergson
patent: 4343993 (1982-08-01), Binnig et al.
patent: 4947042 (1990-08-01), Nishioka et al.
patent: 5808302 (1998-09-01), Binnig et al.

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