Position signal producing apparatus for water alignment

Details Position signal producing apparatus for water alignment Position signal producing apparatus for water alignment

1990-07-11

1991-10-01

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Photocell controlled circuit

356401, G06K 7015

Patent

active

050536281

ABSTRACT:
A position signal producing apparatus, for an apparatus for project-printing a pattern on reticle onto a wafer through a project lens with ultraviolet light, for producing a position signal indicative of position of the wafer, comprises: a laser emitting two different frequency components polarized orthogonally with each other which are splitted by a polarizing beam splitter. The first and second components are reflected by first and second mirrors respectively to produce interference fringes at a given place being on an annular region within a circle defined by field angle of the project lens on the reticle through wave plates for circularly-polarizing. Another interference fringes is formed on a diffraction grating of the wafer in correspondence with the interference fringes through the project lens and a lens for achromatizing the project lens at wavelengths of the components. Another interference fringes reflected by the diffraction grating is detected by a photodetector for producing the position signal. The interference fringes may formed on the wafer by another diffraction grating on the reticle illuminated by the first and second components in combination with polarizing elements provided between the reticle and the wafer in replace with the polarizing beam splitter and wave plates.

REFERENCES:
patent: 4540277 (1985-09-01), Mayer et al.
patent: 4668089 (1987-05-01), Oshida et al.
patent: 4697087 (1987-09-01), Wu
patent: 4780617 (1987-10-01), Umafate et al.
patent: 4795261 (1989-01-01), Nakat et al.
"Phase Grating as Waferstepper Alignment Marks for all Process Layers", by S. Wittekoek et al.; SPIE vol. 538, Optical Microlithography IV (1985); pp. 24-30.

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