Optics: measuring and testing – By polarized light examination
Reexamination Certificate
2008-09-03
2009-06-23
Punnoose, Roy (Department: 2886)
Optics: measuring and testing
By polarized light examination
C356S369000, C356S614000
Reexamination Certificate
active
07551281
ABSTRACT:
A position detecting apparatus for detecting position of an object disposed in a first space by receiving light from the object with a light receiving element disposed outside said first space, said position detecting apparatus includes an optical system for directing light from the object to the light receiving element, and a first optical element transmitting light from the object, disposed in a partitioning member for partitioning said first space and space outside said first space, wherein said first optical element is located on a position on or near a pupil plane or a plane conjugate to the pupil plane of said optical system.
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Mishima Kazuhiko
Sato Hiroshi
Canon Kabushiki Kaisha
Punnoose Roy
Rossi Kimms & McDowell LLP
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