Position measuring method and apparatus

Details Position measuring method and apparatus Position measuring method and apparatus

2005-05-24

2005-05-24

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S055000, C356S401000

Reexamination Certificate

active

06897938

ABSTRACT:
A position measuring apparatus which measures positions of first and second marks. The apparatus includes a detection system which detects an image of the first and second marks, an image processing system which processes the image of the first and second marks, and control system which controls the detection system and the image processing system so that at least two images, of which signal intensities are adjusted with respect to the first and second marks, respectively, are obtained.

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