Position-measuring device with movable deflection device and...

Details Position-measuring device with movable deflection device and... Position-measuring device with movable deflection device and...

2011-01-25

2011-01-25

Connolly, Patrick J (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C250S231160

Reexamination Certificate

active

07876451

ABSTRACT:
A position-measuring device includes a light source, a first grating, a second grating and photodetectors, light from the light source, which is split into partial beams of different directions at the first and second grating, being directed via a deflecting element to the detector. The deflecting element for incident partial beams having different directions has different regions, so that all partial beams directed from the deflecting element to the detector are approximately parallel.

REFERENCES:
patent: 4776701 (1988-10-01), Pettigrew
patent: 5283434 (1994-02-01), Ishizuka et al.
patent: 5327218 (1994-07-01), Igaki
patent: 5760959 (1998-06-01), Michel et al.
patent: 5812320 (1998-09-01), Maeda
patent: 0 163 362 (1985-12-01), None
patent: WO 2007/034379 (2007-03-01), None

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