Position measuring device

Details Position measuring device Position measuring device

2006-03-28

2006-03-28

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S494000, C356S616000, C250S23700G

Reexamination Certificate

active

07019842

ABSTRACT:
A position measuring device for detecting the relative position of a scanning unit and a scale. The position measuring device includes a scale and a scanning unit that is displaced with respect to the scale in a measuring direction. The scanning unit includes a scanning grating, a ridge prism and an optoelectronic detector element. The ridge prism having a ridge that is oriented parallel with the measuring direction, the ridge prism acts as a retro-reflector in a second direction which is aligned in a plane of the scale vertically with respect to the measuring direction.

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Yim-Bun Patrick Kwan et al., “Massarbeit NanometergenauePositionmessung in allen Frieheitsgraden”, F&M, Jahrg. 108, No. 9, 2000, pp. 60-64.

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