Position measurement technique

Details Position measurement technique Position measurement technique

2006-10-24

2006-10-24

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Focus or magnification control

C355S053000

Reexamination Certificate

active

07126670

ABSTRACT:
A position measurement apparatus for measuring a position of a mark includes an image capturing unit, a calculating unit which obtains variation in image data captured by the image capturing unit, and a setting unit which sets a parameter concerning a light receiving amount of the image capturing unit based on variations respectively obtained by the calculating unit with respect to a plurality of image data acquired by the image capturing unit at different light receiving amounts.

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