Position measurement system

Optics: measuring and testing – By light interference – For dimensional measurement

Reexamination Certificate

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Reexamination Certificate

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06985236

ABSTRACT:
A position measurement system optically measures a position of an object in a simple manner at low cost. The position measurement system includes: a light source; an optical lens with a large spherical aberration which transmits light from the light source and forms a light ring due to its spherical aberration; a light receiving device (CCD sensor) which detects the light ring as formed by the optical lens; and a calculator which measures a position of the light source according to detected information on the light ring as detected by the CCD sensor. An optical mirror with a large spherical aberration may be used instead of the optical lens.

REFERENCES:
patent: 4627722 (1986-12-01), Falk et al.
patent: 5640241 (1997-06-01), Ogawa
“Light Interference Lens Method” Yasuji Seko; 63rdAutumn Meeting of the Japan Society of Applied Physics and Related Societies, Proceedings (Sep. 2002), 24p-ZN-7.

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