Position measurement method

Details Position measurement method Position measurement method

2008-02-19

2011-11-08

Toatley, Gregory J (Department: 2877)

Optics: measuring and testing

By alignment in lateral direction

Reexamination Certificate

active

08054465

ABSTRACT:
A part of a plate of a predetermined shape detachably mounted on a moving body is detected by an alignment system while the position of the moving body is measured by a measurement unit that sets a movement coordinate system of the movement body, and based on the detection results and the measurement results of the measurement unit corresponding to the detection results, position information of an outer periphery edge of the plate is obtained. Therefore, even if there are no alignment marks on the moving body for position measurement, the position of the plate, or in other words, the position of the moving body can be controlled on the movement coordinate system set by the measurement unit, based on the position information of the outer periphery edge of the plate.

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