Position finely adjusting apparatus

Details Position finely adjusting apparatus Position finely adjusting apparatus

1976-04-20

1978-05-02

Dobeck, B.

Electricity: motive power systems

Positional servo systems

Digital or numerical systems

318603, 318640, G05B 1928

Patent

active

040877299

ABSTRACT:
The position adjusting apparatus comprises a stationary frame, first and second movable stages respectively, disposed on X and Y axes intersecting at right angles, a plurality of dynamic type electro-mechanical transducers mounted on the axial ends of each movable stage, a first resilient supporting member for mounting the first movable stage to be movable in the direction of X axis, a second resilient supporting member mounted on the first movable stage forming the second movable stage in the direction of the Y axis, and a platform mounted on the second movable stage for supporting an object whose position is to be adjusted.

REFERENCES:
patent: 3733484 (1973-05-01), Bayard
patent: 3786332 (1974-01-01), Hepner et al.
patent: 3789285 (1974-01-01), Nishizawa
patent: 3889164 (1975-06-01), Nishizawa et al.
patent: 3904945 (1975-09-01), Hassan et al.

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