Position error sensing and feedback apparatus and method

Optics: measuring and testing – Angle measuring or angular axial alignment

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Details

356152, 356364, 356400, G01B 1127

Patent

active

047922281

ABSTRACT:
There is provided a position error sensing and feedback apparatus and method for a positioning device having a working piece which is moved along a rectilinear triordinate system. The apparatus comprises a laser source for providing a highly polarized laser beam which is directed substantially parallel to a first of the axes of the triordinate system. In a preferred embodiment, a first laser beam processing package is located along such first axis for receiving the laser beam and splitting such beam into a first portion which is directed outwardly along a path substantially parallel to a second axis of the triordinate system, with the remaining portion directed to at least one error detector means for measuring positional and orientational errors of the first processing package relative the laser beam. A second laser beam processing package is located along the second axis for receiving the first portion of the laser beam and further splitting it into a second portion which is directed outwardly along a path substantially parallel to the third axis of the triordinate system, and directing the remaining portions of the beam to at least one error detector for measuring positional and orientational errors of the second processing package relative the laser beam. A third laser beam processing package is located along the third axis of the triordinate system for receiving the second portion of the laser beam and directing portions thereof to a plurality of error detectors for measuring positional and orientational errors of the third processing package relative the second portion of the laser beam. A feedback processor is provided for communicating the detected translational, angular and rotational deviations to a control unit of the rectilinear positioning device to enable selective correction thereof.

REFERENCES:
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patent: 4618759 (1986-10-01), Muller et al.
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