Position drive

Details Position drive Position drive

1981-12-07

1984-05-15

Watson, Robert C.

Work holders

With fluid means

Vacuum-type holding means

269 71, 279 3, B25B 1100

Patent

active

044484038

ABSTRACT:
A position drive for a wafer in a system for testing of integrated circuit components of the wafer includes a first drive assembly for quick lifting of a wafer-supporting member towards testing probes, second drive assembly for positioning the wafer-supporting member in two stable positions in a vertical direction for compensating thickness allowances of the wafers to be tested and a third drive assembly for mechanical rotation of the wafer-supporting member through any required angle.

REFERENCES:
patent: 4037830 (1977-07-01), Poluzzi et al.
patent: 4066943 (1978-01-01), Roch
patent: 4183545 (1980-01-01), Daly
patent: 4184472 (1980-01-01), Benedicto et al.

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