Position detector for a spin-drying machine used in integrated c

Details Position detector for a spin-drying machine used in integrated c Position detector for a spin-drying machine used in integrated c

1999-06-08

2000-07-18

Tong, Nina

Communications: electrical

Condition responsive indicating system

Specific condition

340673, 340679, 2502221, 250223R, 414331, G08B 2100

Patent

active

060913398

ABSTRACT:
A position detector is provided for use on a spin-drying machine employed in integrated circuit (IC) fabrication to detect whether the spin-drying machine has shifted in position during operation. If the spin-drying machine is positioned incorrectly, the position detector is capable of stopping the operation of robot arms used to grab and position wafers on the spin-drying machine so that the robot arms will not be damaged or crash into the wafers on the spin-drying machine due to the incorrect positioning of the spin-drying machine. The position detector is designed for use on a spin-drying machine having a spinning unit, a fixed platform surrounding the spinning unit, and at least one robot arm mounted on the fixed unit. The position detector comprises a pair of emitters mounted on the spinning unit and a pair of oppositely arranged receivers on the fixed platform. In the event that the spinning unit has shifted in position, one or both of the paired emitter/receiver units generates an OFF signal indicative of such a condition. In response, a control unit stops the operation of the robot arm, so that the robot arm will not be damaged or crash into the wafers on the spin-drying machine.

REFERENCES:
patent: 5225691 (1993-07-01), Powers et al.
patent: 5850185 (1998-12-01), Canty
patent: 5917601 (1999-06-01), Shimazaki et al.

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