Position detection technique

Details Position detection technique Position detection technique

2004-09-30

2008-08-26

Bella, Matthew C. (Department: 2624)

Image analysis

Applications

Manufacturing or product inspection

C382S218000, C382S280000

Reexamination Certificate

active

07418125

ABSTRACT:
An apparatus for detecting a position of a region, corresponding to a mark, in image data, as a mark position, the mark including periodically arranged patterns. A first unit obtains a real-space energy distribution which corresponds to an energy spectrum distribution of each partial area of the image data. A probability distribution obtaining unit obtains a probability distribution based on the real-space energy distribution, the probability distribution indicating repetitive positions of the periodically arranged patterns and the intensity of periodicity at this position. A second unit obtains a degree of correlation between each probability distribution obtained by the probability distribution obtaining unit and a pre-registered probability distribution of the mark, and a third unit obtains the mark position based upon the degrees of correlation obtained by the second unit.

REFERENCES:
patent: 5841520 (1998-11-01), Taniguchi
patent: 6101267 (2000-08-01), Shiraishi
patent: 6225639 (2001-05-01), Adams et al.
patent: 6333786 (2001-12-01), Uzawa et al.
patent: 6559953 (2003-05-01), Davids
patent: 6937397 (2005-08-01), Okuno et al.
patent: 7039889 (2006-05-01), Takahashi et al.
patent: 7181057 (2007-02-01), Adel et al.
patent: 2001-195583 (2001-07-01), None

Affiliated with

Also associated with

Rating

Position detection technique does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Position detection technique, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Position detection technique will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4006445