Position detection method and apparatus, and exposure method...

Details Position detection method and apparatus, and exposure method... Position detection method and apparatus, and exposure method...

2006-03-28

2006-03-28

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

C356S124000, C355S053000, C355S055000, C250S548000

Reexamination Certificate

active

07019836

ABSTRACT:
A position detection method of illuminating an object to be observed with an illumination system having a variable illumination condition to detect a position of the object to be observed by a position detection system, including the steps of measuring each of mark spacings between a plurality of alignment marks arranged on the object to be observed, and selecting the illumination condition on the basis of mark spacing information obtained as the measurement result.

REFERENCES:
patent: 4958160 (1990-09-01), Ito et al.
patent: 5835227 (1998-11-01), Grodnensky et al.
patent: 5943135 (1999-08-01), Mishima
patent: 6151121 (2000-11-01), Mishima
patent: 6335784 (2002-01-01), Mishima
patent: 6664121 (2003-12-01), Grodnensky et al.
patent: 6850327 (2005-02-01), Taniguchi et al.
patent: 2002/0042664 (2002-04-01), Kikuchi
patent: 2002/0165636 (2002-11-01), Hasan
patent: 08339951 (1996-12-01), None

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