Position detection method and apparatus

Details Position detection method and apparatus Position detection method and apparatus

2006-06-27

2006-06-27

Wells, Nikita (Department: 2881)

Radiant energy

Means to align or position an object relative to a source or...

C250S492100, C250S492220

Reexamination Certificate

active

07067826

ABSTRACT:
A reticle stage reference mark3of material having high reflectivity to alignment illumination light is provided on a reticle5, and a chuck mark8of material having high reflectivity to the alignment illumination light is provided on a wafer chuck11. A relative position of the reticle stage reference mark3to the chuck mark8is detected by using a first position detection optical system1and a first illumination optical system2, and relative alignment is performed between the reticle5and a wafer10.

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