Position detection method

Details Position detection method Position detection method

1995-04-26

1997-06-17

Gonzalez, Frank

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

250548, G01B 1100

Patent

active

056402430

ABSTRACT:
An image in which a feature corresponding to a reference mark formed at a predetermined position in an exposure apparatus is formed at a predetermined position in an arbitrary area is stored as a reference image, and a reference image including an image corresponding to the reference mark is detected from an image to be processed obtained by picking up an image near the reference mark to detect the position of the reference mark in the image to be processed, thus enabling detection of the positional relationship between a reference in the exposure apparatus and substrate alignment means.

REFERENCES:
patent: 5189494 (1993-02-01), Muraki
patent: 5309197 (1994-05-01), Mori

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