Position detection method

Details Position detection method Position detection method

1995-12-22

1996-09-17

Gonzalez, Frank

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

250548, G01B 1100

Patent

active

055574114

ABSTRACT:
An interval detection method for detecting the interval between two marks provided on the surface of a wafer with high accuracy using other two marks provided on the wafer, and a method for detecting the relative positions of a wafer and a mask with high accuracy are provided. The method for detecting the interval includes the steps of projecting a first light beam passing through a first mark on the mask and a fifth mark on the wafer onto a predetermined detection surface, projecting a second light beam passing through a second mark on the mask and a sixth mark on the wafer onto the predetermined detection surface, projecting a third light beam passing through a third mark on the mask and the fifth mark onto the predetermined detection surface, projecting a fourth light beam passing through a fourth mark on the mask and the sixth mark onto the predetermined detection surface, and determining the interval between the first mark and the second mark based on information relating to the incident positions of the first, second, third and fourth light beams on the predetermined detection surface, and the interval between the third mark and the fourth mark.

REFERENCES:
patent: 5028797 (1991-07-01), Abe et al.
patent: 5142156 (1992-08-01), Ozawa et al.
patent: 5148037 (1992-09-01), Suda et al.
patent: 5182615 (1993-01-01), Kurosawa et al.
patent: 5200800 (1993-04-01), Suda et al.
patent: 5313272 (1994-05-01), Nose et al.
patent: 5333050 (1994-07-01), Nose et al.
patent: 5455679 (1995-10-01), Houryu et al.

Affiliated with

Also associated with

Rating

Position detection method does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Position detection method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Position detection method will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-417540