Position detection apparatus, position detection method,...

Details Position detection apparatus, position detection method,... Position detection apparatus, position detection method,...

2005-09-27

2005-09-27

Lee, John R. (Department: 2881)

Radiant energy

Means to align or position an object relative to a source or...

C250S492200, C250S492300

Reexamination Certificate

active

06949755

ABSTRACT:
An apparatus which detects a position of a target mark included in an object. The apparatus includes a unit which senses an image of the object, a unit which extracts a first mark and a feature of a region outside of the first mark in the image, and a unit which detects a position of the target mark based on a position of the first mark and the feature.

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