Position detection apparatus, position detection method,...

Details Position detection apparatus, position detection method,... Position detection apparatus, position detection method,...

2008-04-08

2008-04-08

Kim, Robert (Department: 2881)

Radiant energy

Means to align or position an object relative to a source or...

C250S492200, C438S795000

Reexamination Certificate

active

07355187

ABSTRACT:
An apparatus which exposes a substrate to radiant energy includes a unit which holds a first mask having a pattern which includes a pattern of a target mark, a unit which projects a pattern of radiant energy to the substrate through the first mask, a unit which holds a second mask having an auxiliary pattern for identifying the target mark to be formed on the substrate, and a unit which controls the projecting unit so as to project a pattern of radiant energy to the substrate through the second mask.

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Japanese Office Action dated May 7, 2007, issued in corresponding Japanese patent application No. 2002-160299.
Japanese Office Action dated Feb. 19, 2007, issued in corresponding Japanese patent application No. 2002-160299, with English translation.

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