Position detection apparatus, electron beam exposure apparatus,

Details Position detection apparatus, electron beam exposure apparatus, Position detection apparatus, electron beam exposure apparatus,

1997-06-11

1999-07-27

Berman, Jack I.

Radiant energy

Means to align or position an object relative to a source or...

H01L 21027, H01J 37304

Patent

active

059294540

ABSTRACT:
The position of an alignment mark is accurately detected independently of distortion of the sectional structure of the alignment mark or the coating state of a resist that covers the alignment mark. This invention provides a position detection apparatus for detecting the position of an alignment mark formed on an object using an electron beam, which has an element electron optical system array (3) for irradiating electron beams onto the object in a matrix, and a deflector (6) for deflecting the plurality of electron beams. The deflector (6) scans the plurality of electron beams on the alignment mark, a reflected electron detector (9) synthesizes and detects reflected electrons or secondary electrons from the alignment mark upon scanning, and the position of the alignment mark is determined on the basis of the displacement amount of the electron beams and the detection result.

REFERENCES:
patent: 4130761 (1978-12-01), Matsuda
patent: 4132898 (1979-01-01), Buelow et al.
patent: 4370554 (1983-01-01), Bohlen et al.
patent: 4724328 (1988-02-01), Lischke
patent: 4812662 (1989-03-01), Goto et al.
patent: 4980567 (1990-12-01), Yasuda et al.
patent: 5260579 (1993-11-01), Yasuda et al.
patent: 5422491 (1995-06-01), Sakamoto

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