Position detection apparatus and method, exposure apparatus,...

Details Position detection apparatus and method, exposure apparatus,... Position detection apparatus and method, exposure apparatus,...

2005-08-16

2005-08-16

Tsai, H. Jey (Department: 2812)

Semiconductor device manufacturing: process

Formation of electrically isolated lateral semiconductive...

Having substrate registration feature

C355S053000, C250S498100, C250S498100

Reexamination Certificate

active

06930016

ABSTRACT:
In a position detection apparatus which detects the position of an alignment mark, the alignment mark is sensed by a low-magnification image sensing system to acquire a rough position, and a stage is aligned based on the acquired rough position. The alignment mark is sensed by a high-magnification image sensing system to acquire an accurate position. The photoelectric conversion elements of the high- and low-magnification image sensing optical systems are elements whose storage times can be set. A controller determines the signal intensity levels of the photoelectric conversion elements on the basis of electrical signals from the photoelectric conversion elements of the high- and low-magnification image sensing optical systems, and sets storage times appropriate for the photoelectric conversion elements. The position of the alignment mark is detected using signals from the photoelectric conversion elements whose storage times are properly set.

REFERENCES:
patent: 5774575 (1998-06-01), Tanaka et al.
patent: 5815594 (1998-09-01), Tanaka
patent: 5841520 (1998-11-01), Taniguchi
patent: 5943135 (1999-08-01), Mishima
patent: 6151121 (2000-11-01), Mishima
patent: 6295120 (2001-09-01), Miyatake

Affiliated with

Also associated with

Rating

Position detection apparatus and method, exposure apparatus,... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Position detection apparatus and method, exposure apparatus,..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Position detection apparatus and method, exposure apparatus,... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3457443