Position detection apparatus and method

Details Position detection apparatus and method Position detection apparatus and method

2005-12-16

2008-12-16

Lauchman, L. G (Department: 2877)

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

C356S620000, C356S615000, C250S548000

Reexamination Certificate

active

07466414

ABSTRACT:
A position detection method of detecting a position of a detection mark. The method includes a matching step of calculating a value of a correlation using a template for an image including the detection mark, a change step of changing the template to be used for the correlation, a repeat step of, when a value of a correlation in the matching step is not more than a predetermined value, changing the matching processing while changing the template in the change step, and a step of performing position detection on the basis of a result of correlation in the matching step or the repeat step.

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Japanese Office Action dated Apr. 11, 2008, issued in corresponding Japanese patent application No. 2003-044482.

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