Position detection apparatus and exposure apparatus

Image analysis – Applications – Manufacturing or product inspection

Reexamination Certificate

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Details

C382S147000, C382S199000, C382S209000, C382S287000, C250S559360

Reexamination Certificate

active

06925203

ABSTRACT:
A position detection apparatus for detecting a position of a mark on an object includes a camera which captures an image of the mark, an extraction section which extracts a plurality of edge positions of the mark based on a signal derived from the image of the mark, each of the edge positions being associated with a combination of a direction and a polarity of the signal, and a determination section which determines a position of the mark, by comparing each of the plurality of extracted edge positions with a corresponding one of templates prepared for the respective combinations.

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