Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Patent
1997-02-06
1999-01-12
Font, Frank G.
Optics: measuring and testing
By alignment in lateral direction
With registration indicia
356399, 356373, G01B 1100
Patent
active
058597077
ABSTRACT:
Position-detection apparatus (alignment sensors) are disclosed for determining the position of an object (e.g., wafer, bearing a position-detection mark) as required in microlithography processes for manufacturing semiconductor devices and displays. The apparatus comprises an irradiation optical system, a condenser optical system, a first photoelectric detector, a fiducial body bearing a fiducial mark, a combining optical system, a second photoelectric detector, and a processor. The position-detection and fiducial marks are illuminated with coherent illumination light from the irradiation optical system. Light diffracted from the marks is condensed by the condenser optical system. The first photoelectric detector receives the condensed diffracted light and produces first electrical signals. The combining optical system receives the diffracted light from the fiducial mark. The second photoelectric detector receives multiple diffracted light beams from the fiducial mark and produces second electrical signals. From the electrical signals, the processor determines the position of the position-detection mark relative to the fiducial mark.
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Komatsu Koichiro
Nakagawa Masahiro
Sugaya Ayako
Tanaka Masashi
Font Frank G.
Nikon Corporation
Ratliff Reginald A.
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