Position detection apparatus, alignment apparatus and...

Details Position detection apparatus, alignment apparatus and... Position detection apparatus, alignment apparatus and...

2005-03-22

2005-03-22

Smith, Zandra V. (Department: 2877)

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

Reexamination Certificate

active

06870623

ABSTRACT:
A position detection apparatus for detecting a position of a pattern includes a first sensing system which senses a first image of the pattern at a first magnification, a second sensing system which senses a second image of the pattern at a second magnification higher than the first magnification, and a determination system which determines whether a relative position between the second sensing system and the pattern is valid for detecting a position of the pattern based on the first image sensed by the first sensing system.

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