Position detecting system and device manufacturing method using

Details Position detecting system and device manufacturing method using Position detecting system and device manufacturing method using

1997-06-26

2000-11-28

Kim, Robert H.

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

356399, G01N 1100

Patent

active

061542814

ABSTRACT:
A position detecting system for detecting relative position of a first object and a second object having first and second physical optic elements, respectively, includes a light projecting system for projecting light to one of the first and second physical optic elements, wherein light from the one physical optic element illuminated with the light from the light projecting system is projected to the other of the first and second physical optic elements, and a light receiving system for receiving light from the other physical optic element illuminated with the light from the one physical optic element, wherein relative position of the first and second objects can be detected by detecting positional information related to a position of the thus received light upon a predetermined plane, wherein the light projecting system serves to project lights of different wavelengths on to the one physical optic element in different states of convergence or divergence.

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