Position detecting system

Details Position detecting system Position detecting system

1995-02-06

1995-10-03

Limanek, Robert P.

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

356375, 250548, G01B 1127, G01N 2186

Patent

active

054556791

ABSTRACT:
A position detecting system includes a light source for producing a light beam for irradiating a reference mark formed on an object which is relatively displaceable relative to the light beam, a detector for detecting a light quantity distribution of the light from the reference mark, and a circuit for comparing a first light quantity distribution at a first position with a second light quantity distribution at a second position spaced from the first position by a predetermined distance, and for determining a reference position of the object on the basis of the comparison.

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patent: 5235408 (1993-08-01), Matsugu et al.
patent: 5325176 (1994-06-01), Suda et al.

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