Optics: measuring and testing – By polarized light examination – With birefringent element
Patent
1993-09-09
1996-06-04
Turner, Samuel A.
Optics: measuring and testing
By polarized light examination
With birefringent element
356358, G01B 902
Patent
active
055238432
ABSTRACT:
A system for detecting yawing of an article movable in first and second orthogonal directions along a plane includes a first yawing detecting device for detecting any angular change of a first surface of the article opposed to the first yawing detecting device, during movement of the article in the first direction; and a second yawing detecting device for detecting any angular change of a second surface of the article different from the first surface and opposed to the second yawing detecting device, during movement of the article in the second direction.
REFERENCES:
patent: 3692413 (1972-09-01), Marcy et al.
patent: 4676630 (1987-06-01), Matsushita et al.
patent: 4869481 (1989-09-01), Yabu et al.
patent: 4984891 (1991-01-01), Miyazaki et al.
patent: 5040431 (1991-08-01), Sakino et al.
patent: 5114234 (1992-05-01), Otsuka et al.
Ono Kazuya
Yamane Yukio
Canon Kabushiki Kaisha
Turner Samuel A.
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