Position detecting method by reflected scattered light of a lase

Details Position detecting method by reflected scattered light of a lase Position detecting method by reflected scattered light of a lase

1997-07-11

1999-08-24

Assouad, Patrick

Data processing: measuring, calibrating, or testing

Measurement system

Orientation or position

382151, G06K 900

Patent

active

059436387

ABSTRACT:
A position detecting method of detecting the position of a position-detected object through analysis of the detected signal waveform obtained by detecting a reflected scattered light of a laser beam applied to the position-detected object, comprises a step of calculating an approximate line for approximating a base level on the basis of the portion corresponding to the area other than the alignment mark in the detected signal waveform, a step of calculating a specified straight line on the basis of the points on the detected signal waveform at each slice level obtained by scanning the portion corresponding to the alignment mark in the detected signal waveform at a plurality of slice levels, and a step of detecting the position of the alignment mark by the use of the approximate line for the base level and the specified straight line.

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