Position detecting method and position detecting system using th

Details Position detecting method and position detecting system using th Position detecting method and position detecting system using th

1996-10-08

1999-08-24

Kim, Robert H.

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

356400, 250548, G01N 1100

Patent

active

059431350

ABSTRACT:
A position detecting method includes illuminating a mark having a step, by use of an illuminating system, detecting an image of the mark, by use of a position detecting optical system, calculating an evaluation value representing symmetry of the detected mark image, and adjusting a position of an effective light source of the illuminating system with respect to an optical axis of the position detecting optical system, on the basis of the evaluation value.

REFERENCES:
patent: 5686996 (1997-11-01), Fidler et al.

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