Position detecting method and apparatus, exposure apparatus...

Details Position detecting method and apparatus, exposure apparatus... Position detecting method and apparatus, exposure apparatus...

2006-01-31

2006-01-31

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

Position or displacement

Position transverse to viewing axis

C356S622000, C356S400000, C355S053000, C250S548000, C382S294000

Reexamination Certificate

active

06992780

ABSTRACT:
A method of detecting relative position of a reflecting-type reticle and a substrate with the reticle having an alignment mark thereon. The method includes a holding step of holding the reticle on a reticle stage which has a reference mark, and a detection step of detecting position of the alignment mark on the reticle based on alignment light reflected from the alignment mark and detecting relative position between the reference mark on the reticle stage and the alignment mark.

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