Position detecting method and apparatus

Details Position detecting method and apparatus Position detecting method and apparatus

2011-01-04

2011-01-04

Kundu, Sujoy K (Department: 2857)

Data processing: measuring, calibrating, or testing

Measurement system

Orientation or position

C702S092000, C702S094000, C033S300000, C356S138000, C700S302000

Reexamination Certificate

active

07865328

ABSTRACT:
A position detecting method includes the steps of forming an image of a mark on a sensor, performing a first process that processes a raw signal obtained from the sensor with plural parameters, performing a second process that determines an edge of a signal processed by the first process for each parameter, determining a parameter from a result of the second process obtained for each parameter, and calculating a position of the mark based on a determined parameter.

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“Signal Processing Toolbox for Use with MATLAB” by the Math Works Inc. (User's Guide Version 5, pp. 1-14 ˜ 1-15 and 1-20 ˜ 1-21) dated Sep. 2000.

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