Position detecting method and apparatus

Details Position detecting method and apparatus Position detecting method and apparatus

1992-01-08

1993-02-23

Evans, F. L.

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

356374, 356375, 250237G, 250548, G01B 1100

Patent

active

051894947

ABSTRACT:
A position detecting method and apparatus for detecting the relative position of a particular grating pattern with respect to a predetermined reference grating pattern, includes a signal forming step for forming first and second signals corresponding to moire fringes provided or to be provided by the patterns, the first and second signals having phases shiftable in opposite directions in accordance with the position of the particular grating pattern; and a position detecting step for detecting the position of the particular grating pattern on the basis of any difference in phase between the first and second signals.

REFERENCES:
patent: 4251160 (1981-02-01), Bouwhuis et al.
patent: 4779001 (1988-10-01), Makosch
patent: 4814829 (1989-03-01), Kosugi et al.
patent: 4902133 (1990-02-01), Tojo et al.

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