Position detecting method and apparatus

Details Position detecting method and apparatus Position detecting method and apparatus

2006-12-05

2006-12-05

Pham, Hoa Q. (Department: 2877)

Optics: measuring and testing

Position or displacement

C356S401000

Reexamination Certificate

active

07145666

ABSTRACT:
A position detecting method including steps of sensing an image of first and second marks, orthogonally transforming a signal obtained in the sensing step, and calculating each position of the first and second marks based on a phase of a corresponding frequency component obtained in the transform step. Patterns are disposed at a first interval in the first mark, patterns are disposed at a second interval in the second mark, and one of the first and second intervals is not an integer multiple of the other of the first and second intervals.

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