Position detecting method and apparatus

Details Position detecting method and apparatus Position detecting method and apparatus

2006-04-25

2006-04-25

Bui, Bryan (Department: 2863)

Data processing: measuring, calibrating, or testing

Measurement system

Orientation or position

Reexamination Certificate

active

07035759

ABSTRACT:
A position detecting method includes the steps of forming an image of a mark on a sensor, performing a first process that processes a raw signal obtained from the sensor with plural parameters, performing a second process that determines an edge of a signal processed by the first process for each parameter, determining a parameter from a result of the second process obtained for each parameter, and calculating a position of the mark based on a determined parameter.

REFERENCES:
patent: 6081614 (2000-06-01), Yamada et al.
patent: 2001/0049589 (2001-12-01), Yasuda et al.
patent: 2002/0113218 (2002-08-01), Okumura et al.
patent: 2003/0007677 (2003-01-01), Hiroi et al.

Affiliated with

Also associated with

Rating

Position detecting method and apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Position detecting method and apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Position detecting method and apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3594488