Position detecting method

Details Position detecting method Position detecting method

2011-07-19

2011-07-19

Mehta, Bhavesh (Department: 2624)

Image analysis

Applications

Manufacturing or product inspection

C382S103000, C382S141000, C382S145000, C356S401000

Reexamination Certificate

active

07983472

ABSTRACT:
A method detects a position of a mark based on an image signal of the mark. The method includes steps of obtaining a first position of the mark by performing a first process for the image signal, extracting plural feature values from the image signal based on the first position, and detecting the position of the mark by obtaining an offset value for the first position based on the plural feature values.

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