Position detecting device using variable radiation

Details Position detecting device using variable radiation Position detecting device using variable radiation

1987-12-22

1989-08-15

Berman, Jack I.

Radiant energy

Means to align or position an object relative to a source or...

2504922, H01J 37304

Patent

active

048577421

ABSTRACT:
A device for detecting the position of an object by use of an electron beam is disclosed. The device includes a beam supplying portion for supplying an electron beam, a scanning system operable to scan the object with the electron beam, a converting system operable to detect electrons from the object scanned with the electron beam and to convert the electrons into an electric signal, a detecting system operable to detect the position of the object on the basis of the signal from the converting system, and a control unit actable on the supplying portion to change, during the scan of the object, a condition for the irradiation of the object with the electron beam in accordance with the characteristic of the object.

REFERENCES:
patent: 3876883 (1975-04-01), Broers et al.
patent: 4433243 (1984-02-01), Nakamura et al.

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