Position detecting device

Details Position detecting device Position detecting device

1988-07-12

1989-05-16

Laroche, Eugene R.

Optics: measuring and testing

By alignment in lateral direction

With light detector

356375, G01B 1114

Patent

active

048304980

ABSTRACT:
A position detecting device for detecting the position of an object includes an illumination optical system for producing a light beam and for irradiating the object with the light beam, an optical system for focusing the light beam, a focus position controlling system operative to change the position at which the light beam is focused by the focusing optical system, a first detecting device for receiving the light beam reflected from the object to detect the state of incidence of the light beam on the object, and a second detecting device for detecting the position of the object on the basis of the detection of the state of incidence of the light beam on the object by the first detecting means.

REFERENCES:
patent: 3565532 (1971-02-01), Heitmann et al.
patent: 4124273 (1978-11-01), Huignard et al.
Korth, "Laser Scanning Exposure System with Active Focus Control", IBM Tech. Disc. Bulletin, vol. 26, No. 9, Feb. 1984.
Japanese Publication "1983 Seiki Gakkai Autumn Conference Lecture Meeting Papers", pp. 391 and 392.

Affiliated with

Also associated with

Rating

Position detecting device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Position detecting device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Position detecting device will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2318390