Position detecting apparatus generating periodic detection signa

Details Position detecting apparatus generating periodic detection signa Position detecting apparatus generating periodic detection signa

1991-07-25

1993-01-26

Rosenberger, Richard A.

Optics: measuring and testing

By polarized light examination

With light attenuation

250237G, 25023116, H01J 314, G01B 1114

Patent

active

051826135

ABSTRACT:
A displacement detecting device generates first and second periodic signals in accordance with a displacement of a relatively movable object. The first and second periodic signals have differing phases relative to each other and each include a third harmonic component and a fifth harmonic component which are approximately equal to each other. The third and fifth harmonic components are equalized by setting a distance between first and second gratings of the position detection device. By equalizing the third and fifth harmonic components of the periodic detection signals, detection errors are reduced.

REFERENCES:
patent: 4346447 (1982-08-01), Takahama
patent: 4848911 (1989-07-01), Uchida et al.
patent: 4972080 (1990-11-01), Taniguchi
patent: 4985623 (1991-01-01), Ichikawa et al.
patent: 5068530 (1991-11-01), Ieki et al.

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