Optics: measuring and testing – By polarized light examination – With light attenuation
Patent
1991-10-03
1993-07-20
Evans, F. L.
Optics: measuring and testing
By polarized light examination
With light attenuation
33707, 250237G, G01B 1100
Patent
active
052298361
ABSTRACT:
This specification discloses an apparatus which includes a detection unit body having light projecting means and light receiving means disposed in opposed relationship with and at a predetermined distance from the light projecting means, a mask member and a slit member each provided with a plurality of slit openings periodically in a direction orthogonal to the direction of opposition of the light projecting means and the light receiving means and interposed between the light projecting means and the light receiving means in such a manner that the directions of arrangement of the slits are the same direction and in which the mask member is mounted on the light receiving means and the slit member is disposed so as to be movable relative to the detection unit body, and of the light beam from the light projecting means, a light beam passed through the slit openings in both of the slit member and the mask member is detected by the light receiving means, and the relative positional information of the detection unit body and the slit member is detected by the utilization of the output signal from the light receiving means.
REFERENCES:
patent: 3812352 (1974-05-01), MacGovern
patent: 4297033 (1981-10-01), Nelle
patent: 4636079 (1987-01-01), Rieder
patent: 4672201 (1987-06-01), Welker
Canon Kabushiki Kaisha
Evans F. L.
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